BREVA hexapod has been specially designed to provide high angular accuracy. It allows angular positioning of objects like samples, probes or sensors with a resolution of 0.5 µm or 2.5 µrad.
As a reminder, the hexapod is a platform with a parallel structure enabling very high precision positioning of objects in space according to the 6 degrees of freedom.
BREVA hexapod can be used in any orientation: vertical, horizontal, upside down…
Linear travel range
± 75 mm
RESOLUTION
0.5 µm
Repeatability
± 0.5 µm
PAYLOAD
200 kg
Motion and positioning
| Travel range Tx, Ty (mm) | ± 75 |
| Travel range Tz (mm) | ± 50 |
| Travel range Rx, Ry (deg) | ± 20 |
| Travel range Rz (deg) | ± 22 |
| Resolution Tx, Ty, Tz (µm) | 0.5 |
| Resolution Rx, Ry, Rz (µrad) | 2.5 |
| Repeatability Tx, Ty, Tz (µm) | ± 0.5 |
| Repeatability Rx, Ry, Rz (µrad) | ± 2.5 |
| Speed Tx, Ty (mm/s) | 6 |
| Speed Tz (mm/s) | 4 |
| Speed Rx, Ry (deg/s) | 1.5 |
| Speed Rz (deg/s) | 2.25 |
Mechanical properties
| Stiffness X, Y (N/µm) | 5 | ||
| Stiffness Z (N/µm) | 32 | ||
| Payload capacity (kg) (vertical orientation / horizontal orientation) | 200 / 80 | ||
| Motor type | Stepper motor, gearhead | ||
| Encoder type | Absolute encoder | ||
Miscellaneous
| Operating temperature range (°C) | 0 to + 50 |
| Materials | Aluminum, steel, stainless steel, plastic |
| Mobile platform size (mm) | Ø 289 |
| Mobile platform central aperture (mm) | Ø 120 |
| Fixed platform size (mm) | Ø 580 |
| Fixed platform central aperture (mm) | Ø 250 |
| Height in middle position (mm) | 350 |
| Footprint (mm) | Ø 606 |
| Mass (kg) | 34 |
| Cable length (m) | 3 |
Controller
| Controller type | ALPHA+ | ||
| Interface | Ethernet | ||
| Power supply | 110-240 VAC / 50-60 Hz | ||
Clean room compatibility
Remote control
Datasheet (PDF)
STEP 3D (ZIP)
3D view
