Clean-compatible hexapod

Our hexapods for clean environments up to ISO 5

Cleanroom-compatible hexapods

Submicron precision in an ultra-clean environment

Symétrie precision positioning hexapods are designed to operate in cleanroom environments up to ISO Class 5, in accordance with ISO 14644.
Under these conditions, airflow control, particle emission reduction, and surface cleanliness are essential to ensure stable and repeatable positioning performance.

Thanks to their parallel architecture with six degrees of freedom, these systems ensure precise, rigid, and repeatable positioning, ideal for optical alignment, microtechnical assembly, or metrological characterization operations.

Design and procedures dedicated to clean rooms

Each Symétrie hexapod intended for use in a controlled environment undergoes a specific preparation process designed to minimize particle emissions and outgassing:

  • Choice of low-particle-emission materials: anodized aluminum, polished stainless steel, cleanroom-approved technical polymers.
  • Replacement of standard lubricants with special low-volatility greases, approved according to ISO 21348 criteria.
  • Thorough cleaning of mechanical and electronic components and wiring according to an internal protocol using solvents and deionized water rinsing.
  • Assembly under gloves in an ISO 5 filtered environment to prevent contamination during assembly.
  • Particle inspection and functional testing after assembly.
  • Final cleaning under laminar flow, followed by double sterile bag packaging, allowing direct introduction into the user’s clean room.

These procedures guarantee a controlled level of particulate cleanliness and mechanical stability without compromising the precision of the movement.

SOLANO
Miniature hexapod

Precision positioning hexapod : SOLANO

Miniature hexapod designed for positioning and adjusting space-saving components with resolution down to 0.08 µm.

Resolution: 0.08 µm
Linear travel: ± 18 mm
Angular travel: ± 21°
Centered position size: 104 mm
Max. load: 5 kg

MAUKA
Compact hexapod

Compact hexapod with a footprint of 107 mm, designed to position loads of up to 5 kg with sub-micron resolution.

Resolution: 0.5 µm
Linear travel: ± 10 mm
Angular travel: ± 8°
Centered position size: 198 mm
Max. load: 5 kg

BORA
Precise and small hexapod

Precision positioning hexapod : BORA

Precise and small hexapod designed for positioning and adjusting high-precision components with 0.1 µm resolution.

Resolution: 0.1 µm
Linear travel: ± 20 mm
Angular travel: ± 15°
Centered position size: 145 mm
Max. load: 10 kg

PUNA
Simple and affordable hexapod

Precision positioning hexapod : PUNA

Simple and affordable hexapod designed for precision positioning applications in the research field on an optimized budget.

Resolution: 0.5 µm
Linear travel: ± 30 mm
Angular travel: ± 20°
Centered position size: 200 mm
Max. load: 25 kg

BREVA
Mid-sized hexapod positioner

Precision positioning hexapod : BREVA

Mid-sized hexapod designed for positioning and calibrating loads weighing up to 200 kg with 0.5 µm resolution.

Resolution: 0.5 µm
Linear travel: ± 75 mm
Angular travel: ± 22°
Centered position size: 350 mm
Max. load: 200 kg

ZONDA
Hexapod micropositioning system

Precision positioning hexapod : ZONDA

High-performance micro-positioning hexapod for applications requiring high precision, heavy loads and long strokes.

Resolution: 0.1 µm
Linear travel: ± 200 mm
Angular travel: ± 20°
Centered position size: 640 mm
Max. load: 400 kg

SIRIUS
Strong precision hexapod system

Precision positioning hexapod : SIRIUS

Strong precision hexapod system for high-resolution adjustment of objects up to 1000 kg in the optical, space and aerospace.

Resolution: 5 µm
Linear travel: ± 150 mm
Angular travel: ± 20°
Centered position size: 750 mm
Max. load: 1 000 kg

JORAN
High precision hexapod for heavy loads

Precision positioning hexapod : JORAN

High precision hexapod for heavy loads designed for positioning and adjusting components up to 1500 kg with 0.5 µrad resolution.

Resolution: 0.1 µm
Linear travel: ± 65 mm
Angular travel: ± 10°
Centered position size: 800 mm
Max. load: 1500 kg

Expertise recognized worldwide

Some clean specific projets (up to ISO5)

Symétrie, hexapod expert for 25 years

Our precision positioning experts are here to answer your technical questions and help you choose the solution best suited to your application.

FAQ

The hexapod can perform combined movements across its six degrees of freedom: three translations (X, Y, Z) and three rotations (Rx, Ry, Rz). This flexibility allows for complex adjustments that would be impossible with conventional guidance systems.

Our hexapods achieve resolutions of around 0.1 µm for linear motion and a few microradians for rotational motion. Repeatability is one of our key strengths, ensuring the accuracy of every positioning operation.

We use high-performance materials such as anodised aerospace-grade aluminium, stainless steel and components specifically designed for demanding environments (vacuum, cleanroom, non-magnetic).

Absolutely. We provide function libraries (SDKs) compatible with LabVIEW, C++ and Python, as well as specific interfaces for research environments such as EPICS and TANGO.

Safety and reliability are at the heart of our design. The software features configurable travel limits, virtual collision detection and hardware safety features to protect your equipment and samples.

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