Vacuum-compatible hexapod

Our hexapods for environments down to 10−6 mbar

Vacuum and high-vacuum compatible hexapods

High-precision positioning in extreme conditions

Symétrie hexapods are specially designed for applications requiring precise positioning in vacuum or ultra-high vacuum environments, down to 10⁻⁶ mbar. These multi-axis systems deliver stable, repeatable performance where atmospheric conditions do not allow it.

High vacuum limits contamination, oxidation, and mechanical disturbances, ensuring reliable measurement and high-precision metrology.

A design adapted to high vacuum

Our vacuum-compatible hexapods feature:

  • Low outgassing materials, selected for their chemical and mechanical stability, particularly on cables,
  • Vacuum-compatible lubricants, ensuring smooth movement without particle emission,
  • High vacuum-compatible motors and sensors, guaranteeing precise movement control.

Each component is optimized to withstand the thermal and physical stresses inherent in vacuum environments, while maintaining submicron positioning stability and accuracy.

MAUKA
Compact hexapod

MAUKA hexapod détouré

Compact hexapod with a footprint of 107 mm, designed to position loads of up to 5 kg with sub-micron resolution.

Resolution: 0.5 µm
Linear travel: ± 10 mm
Angular travel: ± 8°
Centered position size: 198 mm
Max. load: 5 kg

BORA
Precise and small hexapod

Precise and small hexapod designed for positioning and adjusting high-precision components with 0.1 µm resolution.

Resolution: 0.1 µm
Linear travel: ± 20 mm
Angular travel: ± 15°
Centered position size: 145 mm
Max. load: 10 kg

ZONDA
Hexapode de micropositionnement

Zonda hexapod

Hexapode de micro positionnement ultra-performant pour applications demandant haute précision, forte charge et grandes courses.

Résolution : 0,1 µm
Course linéaire : ± 200 mm
Course angulaire : ± 20°
Taille position centrée : 640 mm
Charge max : 400 kg

JORAN
High precision hexapod for heavy loads

High precision hexapod for heavy loads designed for positioning and adjusting components up to 1500 kg with 0.5 µrad resolution.

Resolution: 0.1 µm
Linear travel: ± 65 mm
Angular travel: ± 10°
Centered position size: 800 mm
Max. load: 1500 kg

Expertise recognized worldwide

Some high-vacuum (10-6 mbar) specific projects

Symétrie, hexapod expert for 25 years

Our precision positioning experts are here to answer your technical questions and help you choose the solution best suited to your application.

FAQ

The hexapod can perform combined movements across its six degrees of freedom: three translations (X, Y, Z) and three rotations (Rx, Ry, Rz). This flexibility allows for complex adjustments that would be impossible with conventional guidance systems.

Our hexapods achieve resolutions of around 0.1 µm for linear motion and a few microradians for rotational motion. Repeatability is one of our key strengths, ensuring the accuracy of every positioning operation.

We use high-performance materials such as anodised aerospace-grade aluminium, stainless steel and components specifically designed for demanding environments (vacuum, cleanroom, non-magnetic).

Absolutely. We provide function libraries (SDKs) compatible with LabVIEW, C++ and Python, as well as specific interfaces for research environments such as EPICS and TANGO.

Safety and reliability are at the heart of our design. The software features configurable travel limits, virtual collision detection and hardware safety features to protect your equipment and samples.

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