PIEZO HEXAPOD WITH NANOMETER RESOLUTION
NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.
NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.
Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.
Travel range
± 5 mm / ± 10 °
RESOLUTION
10 nm / 1 µrad
Repeatability
± 38 nm / ± 1 µrad
Payload
500g
Motion and positioning
| Travel range Tx, Ty (mm) | ± 5 |
| Travel range Tz (mm) | ± 4 |
| Travel range Rx, Ry (deg) | ± 7 |
| Travel range Rz (deg) | ± 10 |
| Resolution Tx, Ty, Tz (µm) | 10 |
| Resolution Rx, Ry, Rz (µrad) | 1 |
| Repeatability Tx, Ty, Tz (µm) | ± 38 |
| Repeatability Rx, Ry, Rz (µrad) | ± 1 |
| Speed (mm/s; deg/s) | 1; 1 |
Mechanical properties
| Payload capacity (g) (vertical orientation) | 500 |
| Motor type | Piezo motor |
Miscellaneous
| Operating temperature range (°C) | + 5 to + 40 |
| Materials | Aluminum, invar, ceramic, stainless steel |
| Mobile platform size (mm) | Ø 72 |
| Mobile platform central aperture (mm) | Ø 32 |
| Fixed platform size (mm) | Ø 120 |
| Fixed platform central aperture (mm) | Ø 32 |
| Height in middle position (mm) | 68 |
| Footprint (mm) | Ø 120 |
| Mass (g) | 505 |
| Cable length (m) | 1.2 |
| Options | Customized platform design Larger travel range Scalable size Vacuum compatibility Non magnetic |
Controller
| Controller type | CAPELLA |
| Interface | Ethernet, USB, Serial (RS-232) |
| Power supply | 110-240 VAC / 50-60 Hz |
Customized platform design
Larger travel range
Scalable size
Vacuum compatibility
Non magnetic
Datasheet (PDF)
STEP 3D (ZIP)
3D view (PDF)
