NanoPos

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.
NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high-quality joints, and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

Travel range

± 5 mm / ± 10 °

RESOLUTION

10 nm / 1 µrad

Repeatability

± 38 nm / ± 1 µrad

Payload

500g

Motion and positioning

Travel range Tx, Ty (mm)± 5
Travel range Tz (mm)± 4
Travel range Rx, Ry (deg)± 7
Travel range Rz (deg)± 10
Resolution Tx, Ty, Tz (µm)10
Resolution Rx, Ry, Rz (µrad)1
Repeatability Tx, Ty, Tz (µm)± 38
Repeatability Rx, Ry, Rz (µrad)± 1
Speed (mm/s; deg/s)1; 1

Mechanical properties

Payload capacity (g) (vertical orientation)500
Motor typePiezo motor

Miscellaneous

Operating temperature range (°C)+ 5 to + 40
MaterialsAluminum, invar, ceramic, stainless steel
Mobile platform size (mm)Ø 72
Mobile platform central aperture (mm)Ø 32
Fixed platform size (mm)Ø 120
Fixed platform central aperture (mm)Ø 32
Height in middle position (mm)68
Footprint (mm) Ø 120
Mass (g)505
Cable length (m)1.2
Options

Customized platform design

Larger travel range

Scalable size

Vacuum compatibility

Non magnetic

Controller

Controller typeCAPELLA
InterfaceEthernet, USB, Serial (RS-232)
Power supply110-240 VAC / 50-60 Hz
Customized platform design
Larger travel range
Scalable size
Vacuum compatibility
Non magnetic

Learn more about our powerful controller

Read more about our ergonomic software

Datasheet (PDF)

STEP 3D (ZIP)

3D view (PDF)